Fabrication and Design of Resonant Microdevices
Nonfiction, Science & Nature, Technology, Technical & Manufacturing Industries & Trades, Electronics, Microelectronics
| Author: | Behraad Bahreyni | ISBN: | 9780815519713 |
| Publisher: | Elsevier Science | Publication: | October 20, 2008 |
| Imprint: | William Andrew | Language: | English |
| Author: | Behraad Bahreyni |
| ISBN: | 9780815519713 |
| Publisher: | Elsevier Science |
| Publication: | October 20, 2008 |
| Imprint: | William Andrew |
| Language: | English |
This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.
- Offers numerous academic and industrial examples of resonant MEMS
- Provides an analytic model of device behaviour
- Explains two-port systems in detail
- Devotes ample space to excitation and signal detection methods
- Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.
- Offers numerous academic and industrial examples of resonant MEMS
- Provides an analytic model of device behaviour
- Explains two-port systems in detail
- Devotes ample space to excitation and signal detection methods
- Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
